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Microbolometers
This project contains design and fabrication of uncooled thermal microbolometer detectors and readout circuitry.
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Surface Micromachined Gyroscopes
We are developing micromachined inertial measurement units including micromachined gyroscopes and accelerometers for high-performance applications.
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RF MEMS
This project is devoted to developing RF components which employ MEMS technology.
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Capacitive Pressure Sensors
The aim of this project is the design and fabrication of two types of micromachined capacitive pressure sensor for industrial and biomedical application.
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Piezoresistive Pressure Sensors
In this project, our aim is to produce low-cost piezoresistive pressure sensors with variuos sensitivities for industrial applications.
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CMOS Termopiles
In this project, we develop a new thermopile structure using n-poly/p+ active layers that are available in any CMOS technology.
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Humidity Sensors
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