METUMEMS Research Group

Middle East Technical University
Department of Electrical and Electronics Engineering

Uncooled N-well Microbolometer IR FPA in Standard CMOS
	Selim Eminoglu , "UNCOOLED INFRARED FOCAL PLANE ARRAYS WITH INTEGRATED READOUT CIRCUITRY USING MEMS AND STANDARD CMOS TECHNOLOGIES ", PhD. Thesis, Middle East Technical University, Ankara, Turkey, 2003.
	Mahmud Yusuf Tanrikulu, "A HIGH FILL FACTOR CMOS UNCOOLED INFRARED MICROBOLOMETER DETECTOR", MSc. Thesis, Middle East Technical University, Ankara, Turkey, 2002.
	Deniz Sabuncuoglu, "A CMOS COMPATIBLE UNCOOLED INFRARED DETECTOR FOCAL PLANE ARRAY FOR NIGHT VISION APPLICATIONS USING MEMS TECHNOLOGY", PhD. Thesis, Middle East Technical University, Ankara, Turkey, 2002.
	Kemal Şafak Demirci, “A Low-Cost 16x16 Uncooled Infrared Detector FPA Using Standard CMOS and Wafer Level MEMS Processes,” MS Thesis, August 2005. Currently at Georgia Institute of Technology
	Erkan Alpman,* “Development of Low-Cost Uncooled Infrared Detector Arrays in Standard CMOS and SOI-CMOS Processes,” MS Thesis, September 2005.
	Gozde Ceren Yasinok, “Development of Electrochemical Etch-Stop Techniques for Integrated MEMS Sensors,” MS Thesis, September 2006.
	Omer Ozgur Yildirim, “High Performance Readout Electronics for Uncooled Infrared Detector Arrays,” MS Thesis, September 2006.
	Mehmet Batuhan Dayanik, “Low-Cost High Performance Infrared Detectors in SOI-CMOS Technology,” MS Thesis, August 2007.
	Yusuf Tanrikulu, "An Uncooled Infrared Microbolometer Detector Array Using Surface Micromachined MEMS Technology," Ph.D. Thesis, August 2007.
	S. Eminoglu, D. Sabuncuoglu Tezcan, M.Y. Tanrikulu, and T. Akin, “Low-Cost Uncooled Infrared Detectors in CMOS Process,” Sensors and Actuators A , Vol. 109/1-2, pp. 102-113, Dec. 2003.
	D. Sabuncuoglu Tezcan, S. Eminoglu, and T. Akin, “A Low Cost Uncooled Infrared Microbolometer Detector in Standard CMOS Technology,” IEEE Trans. on Electron Devices, Vol. 50, No. 2, pp. 494-502, Feb. 2003.
	S. Eminoglu, M. Y. Tanrikulu, and T. Akin, “A Low-Cost 128x128 Uncooled Infrared Detector Array in CMOS Process,” Accepted, IEEE/ASME
	S. Eminoglu, M.Y. Tanrikulu, and T. Akin, “Low-Cost 64x64 Uncooled Infrared Detector Arrays in Standard CMOS,” The 12th Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS'03, Eurosensors XV), Boston, Massachusetts, June 8-12, 2003.
	S. Eminoglu, M.Y. Tanrikulu, and T. Akin, “Low-Cost Uncooled Infrared Detector Arrays in Standard CMOS,” SPIE AeroSense Symposium, Infrared Technology and Applications XXIX (Aerosense 2003), SPIE Vol. 5074, Orlando, Florida, April 21-25, 2003.
	S. Eminoglu, D. Sabuncuoglu Tezcan, M.Y. Tanrikulu, and T. Akin, "Low-Cost Uncooled Infrared Detectors in CMOS Process," The 16th European Conf. on Solid-State Transducers (Eurosensors XVI), Prague, Czech Republic, September 15-18, 2002.
	S. Eminoglu, M.Y. Tanrikulu, D. Sabuncuoglu Tezcan, and T. Akin, "A Low-Cost, Small Pixel Uncooled Infrared Detector for Large Focal Plane Arrays using a Standard CMOS Process," SPIE AeroSense Symposium, Infrared Technology and Applications XXVIII (Aerosense 2002), SPIE Vol. 4721, Orlando, Florida, April 1-5, 2002.
	S. Eminoglu, D. S. Tezcan, and T. Akin, "A CMOS N-Well Microbolometer FPA with Temperature Coefficient Enhancement Circuitry," AeroSense 2001, SPIE Vol. 4369, Orlando, Florida, April 16-20, 2001.
	D. S. Tezcan, S. Eminoglu, O. S. Akar, and T. Akin, "An Uncooled Microbolometer Infrared Focal Plane Array in Standard CMOS" OPTO 2001, SPIE Vol. 4288, San Jose, California, 19-26 January, 2001.
	D. S. Tezcan, S. Eminoglu, O. S. Akar, and T. Akin, "A Low Cost Uncooled Infrared Microbolometer Focal Plane Array Using the CMOS N-Well Layer," MEMS 2001, January 21-25, 2001
	D.S. Tezcan, F. Kocer, and T. Akin, "An Uncooled Microbolometer Infrared Detector in any Standard CMOS Technology," TRANSDUCERS'99.

Surface Micromachined Gyroscope
	Alper Said Emre, "Silicon Surface Micromachined Gyroscope using MEMS Technology," MS Thesis, September 2000.
	Refet Firat Yazicioglu, " Surface Micromachined Capacitive Accelerometers using MEMS Technology," MS Thesis, August 2003.
	Mehmet Akif Erismis, “MEMS Accelerometers and Gyroscopes for Inertial Measurement Units,” MS Thesis, September 2004.
	Said Emre Alper, “MEMS Gyroscopes for Tactical-Grade Inertial Measurement Applications,” Ph.D. Thesis, September 2005.
	Kanber Mithat Silay, “High Performance CMOS Capacitive Interface Circuits for MEMS Gyroscopes,” MS Thesis, September 2006.
	Kıvanç Azgin, “High Performance MEMS Gyroscopes,” MS Thesis, February 2007.
	Yüksel Temiz, “Advanced Readout and Control Electronics for MEMS Gyroscopes,” MS Thesis, August 2007.
	S. E. Alper and T. Akin , A Single-Crystal Silicon Symmetrical and Decoupled MEMS Gyroscope on an Insulating Substrate,” Journal of MicroElectroMechanical Systems , Vol. 14, No. 4, pp. 707-717, August 2005.
	S. E. Alper and T. Akin , "A Symmetrical and Decoupled Nickel Microgyroscope on Insulating Substrate, " Sensors and Actuators A , Vol. 115/2-3, pp. 336-350, 2004.
	S.E. Alper and T. Akin, "A Symmetric Surface Micromachined Gyroscope with Decoupled Oscillation Modes," Sensors and Actuators A, Vol. 97-98C, pp. 337-348, April 2002.
	S. E. Alper , I. E. Ocak , and T. Akin , “Ultra-Thick and High-Aspect-Ratio Nickel Microgyroscope Using EFAB Multi-Layer Additive Electroforming Process,” Accepted, The 19 th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006), Istanbul, Turkey, January 22-26, 2006.
	S. E. Alper , K. Azgin , and T. Akin , “High-Performance SOI-MEMS Gyroscope with Decoupled Oscillation Modes,” Accepted, The 19 th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006) , Istanbul , Turkey , January 22-26, 2006 .
	S. E. Alper , K. M. Silay , and T. Akin , “A Low-Cost Rate-Grade Nickel Microgyroscope ,” The 19th European Conf. on Solid-State Transducers ( Eurosensors XIX), Barcelona , Spain , September 11-14, 2005 .
	S.E. Alper and T. Akin, “A Symmetrical and Decoupled Nickel Microgyroscope on Insulating Substrate,” The 17th European Conf. on Solid-State Transducers (Eurosensors XVII), Guimaraes, Portugal, September 21-24, 2003.
	S.E. Alper and T. Akin, “A Single-Crystal Silicon Symmetrical and Decoupled Gyroscope on Insulating Substrate,” The 12th Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS'03, Eurosensors XV), Boston, Massachusetts, June 8-12, 2003, accepted.
	S.E. Alper and T. Akin, "A Symmetrical and Decoupled Microgyroscope with Electroforming Process on Insulating Substrates," submitted to The 16th European Conference on Solid-State Transducers, Eurosensors'02.
	S.E. Alper and T. Akin, "Optimum Designs for High-Performance Micromachined Gyroscopes," NATO RTO Sensors & Electronics Technology (RTO-SET) Panel: Symposium on Emerging Military Capabilities Enabled by Advances in Navigation Sensors, (accepted for publication), 14-16 October 2002, Turkey.
	S.E. Alper and T. Akin, "A Symmetric Surface Micromachined Gyroscope with Decoupled Oscillation Modes," The 11th Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS'01, Eurosensors XV), pp. 456-459, Munich, Germany, June 10-14, 2001.
	S.E. Alper and T. Akin, "A Planar Gyroscope Using a Standard Surface Micromachining Process," The 14th European Conf. on Solid-State Transducers (Eurosensors XIV), pp. 387-390, Copenhagen, Denmark, August 27-30, 2000.

RF MEMS Component Development
	Ipek Istanbulluoglu, “A Novel Modeling Methodology and Performance Improvement Technique for DMTL Phase Shifters,” MS Thesis, September 2006. Co-advisor: Assoc. Prof. Dr. Sencer Koç.
	Engin Ufuk Temocin, “Design and Implementation of Microwave Lumped Components and System Integration using MEMS Technology,” MS Thesis, September 2006. Co-advisor: Assoc. Prof. Dr. Simsek Demir.
	Kagan Topalli, "A Monolithic Phased Array using RF MEMS Technology,” Ph.D. Thesis, June 2007. Co-advisor: Assoc. Prof. Dr. Özlem Aydin Çivi.
	Halil Ibrahim Atasoy, “Tunable Amplifier with the Hybrid Use of HEMT and MEMS Technologies,”MS Thesis, August 2007. Co-advisor: Assoc. Prof. Dr. Simsek Demir.
	Omer Bayraktar, “A Reflectarray using RF MEMS Technology,” MS Thesis, August 2007. Assoc. Prof. Dr. Özlem Aydin Çivi.
	K. Topalli, M. Unlu, S. Demir, O. Aydin Civi, S. Koc, and T. Akin, “A New Approach for Modeling Distributed MEMS Transmission Lines,” IEE Proc. Microwaves, Antennas & Propagation, Vol. 153, pp.152-162, April 2006.
	E. Erdil, K. Topalli, M. Unlu, O. Aydin Civi, and T. Akin, "Frequency Tunable Microstrip Patch Antenna using RF MEMS Technology," IEEE Trans. Antennas and Propagation, vol.55, no.4, p.1193-1196, April 2007.
	K. Topalli, O. Aydin Civi, S. Demir, S. Koc, and T. Akin, “A Monolithic Phased Array using 3-bit Distributed RF MEMS Phase Shifters,” Accepted, IEEE Trans. Microwave Theory Tech. Techniques, 2007
	K. Topalli, M. Unlu, O. Aydin Civi, S. Demir, S. Koc, and T. Akin, "A Monolithic Phased Array using 3-Bit RF MEMS Phase Shifters," accepted to 2006 IEEE AP-S International Symposium and USNC/URSI National Radio Science Meeting.
	K. Topalli, E. Erdil, O. Aydin Civi, “Reconfigurable Antenna Structures using MEMS technology,” URSI GA 2005, pp. , New Delhi, India, October 2005.
	E. Erdil, S. Onat, K. Topalli, I. Istanbulluoglu, M. Unlu, S. Demir, L. Alatan, O. Aydin Civi, S. Koc, and T. Akin, “Reconfigurable Antenna Structures using MEMS technology,” 6th Workshop on MEMS for MilimeterWave Communications (MEMSWAVE), pp. 35-38, Lausanne, Switzerland, 23-24 June 2005.
	E. Erdil, K. Topalli,, O. Aydin Civi, and T. Akin, “Reconfigurable CPW-fed dual frequeny rectangular slot antenna,” 2005 AP-S International Symposium and USNC/URSI National Radio Science Meeting, Washington D.C., vol.2A, pp.392-395, 3-8 July 2005.
	S. Onat, M. Unlu, L. Alatan, S. Demir, and T. Akin, “Design of a re-configurable dual frequency microstrip antenna with integrated RF MEMS switches”, IEEE Antennas and Propagation Society International Symposium, Volume: 2A, pp 384- 387, 3-8 July 2005
	M. Unlu, K. Topalli, S. Demir, O. Aydin Civi, S. Koc, and T. Akin, “A Parametric Modeling Study on Distributed MEMS Transmission lines,” European Microwave Conference 2004, Amsterdam, The Netherlands 11-15 October 2004, pp.1157-1160.
	K. Topallı, M. Ünlü, Ş. Demir, Ö. Aydın Çivi, S. Koç ve T. Akın, “RF MEMS teknolojisi ile mikroşerit ve eşdüzlemsel dalga kılavuzu hat üstünde paralel anahtar yapıları,” National URSI Meeting 2004, pp. 370-372, 8-10 September 2004 (in Turkish).
	M. Ünlü, K. Topallı, Ş. Demir, Ö. Aydın Çivi, S. Koç ve T. Akın, “Siralanmis MEMS iletim hatlari icin yeni bir model,” National URSI Meeting, pp. 435-437, 8-10 September 2004 (in Turkish).
	K. Topalli, M. Unlu H. Sagkol, S. Demir, O. Aydin Civi, S. Koc, and T. Akin, “A New Model for Distributed MEMS Transmission Lines,” 2004 AP-S International Symposium and USNC/URSI National Radio Science Meeting, Monterey, California, vol.3, pp.2855-2858, 20-25 June 2004.
	K. Topalli, M. Unlu, S. Demir, O. Aydin Civi, S. Koc, and T. Akin, “A Parametric Modeling Study on Distributed MEMS Transmission Lines,” 5th Workshop on MEMS for MilimeterWave Communications (MEMSWAVE), pp. I13-I16, Uppsala, Sweden, 30 June-2 July 2004.
	M. Unlu, K. Topalli, S. Demir, O. Aydin Civi, S. Koc, and T. Akin, “Design and Modeling of a Reconfigurable Triple Stub Impedance Matching Network using Distributed MEMS Transmission Lines,” 5th Workshop on MEMS for MilimeterWave Communications (MEMSWAVE), pp. I17-I20, Uppsala, Sweden, 30 June-2 July 2004.
	K. Topalli, H. Sagkol, M. Unlu, S. Onat, O. Aydin Civi, S. Demir, S. Koc, L. Alatan, T. Akin, "Microwave Circuit Components and Reconfigurable Antennas Using RF MEMS Technology," Proceeding of 4th COST284 Management Committee Meeting & Workshop with INICA, Berlin-Germany, 19 September 2003.
	M. Unlu, K. Topalli, H. Sagkol, S. Demir, O. Aydin Civi, S. Koc, and T. Akin, "RF MEMS Adjustable Impedance Matching Network and Adjustable Power Divider," 2002 IEEE AP-S International Symposium and USNC/URSI National Radio Science Meeting, pp. 26-29, San Antonio, Texas, 16-21 June 2002.
	M. Unlu, K. Topalli, H. Sagkol, S. Demir, O. Aydin Civi, S. Koc, and T. Akin, "New MEMS Switch Structures for Antenna Applications," 2002 IEEE AP-S International Symposium and USNC/URSI National Radio Science Meeting, p.134, San Antonio, Texas, 16-21 June 2002.
	H. Sagkol, K. Topalli, M. Unlu, O. Aydin Civi, S. Koc, S. Demir, and T. Akin, "A Monolithic Phased Array with RF MEMS Technology," 2002 IEEE AP-S International Symposium and USNC/URSI National Radio Science Meeting, pp. 760-763, San Antonio, Texas, 16-21 June 2002.
	M. Unlu, H. Sagkol, K. Topalli, O. Aydin Civi, S. Demir, S. Koc and T. Akin, "RF MEMS Teknolojisi ile Ayarlanabilir Empedans Uyumlama ve Guc Bolucu Devreleri," National URSI-Meeting 2002, pp. 142-145, September 2002 (in Turkish).
	M. Unlu, H. Sagkol, K. Topalli, O. Aydin Civi, S. Demir, S. Koc and T. Akin, "Anten Uygulamalari icin Yeni MEMS Anahtar Yapilari," National URSI Meeting 2002, pp. 146-149, September 2002 (in Turkish).
	K. Topalli, H. Sagkol, M. Ünlü, O. Aydin Civi, S. Demir, S. Koc and T. Akin, "RF MEMS Teknolojisi ile Faz Dizili Anten," National URSI Meeting 2002, pp. 134-137, September 2002 (in Turkish).
	H. Sagkol, M. Ünlü, K. Topalli, O. Aydin Civi, S. Demir, S. Koc and T. Akin, "RF MEMS Teknolojisi ile Mikrodalga Faz Kaydiricilari," National URSI Meeting 2002, pp. 138-141, September 2002 (in Turkish).

Silicon Micromachined Capacitive Pressure Sensors for Industrial and Biomedical Applications
	O. Akar, "Silicon Micromachined Capacitive Pressure Sensors for Industrial and Biomedical Applications," MSc. Thesis, Middle East Technical University, Ankara, Turkey, 1998.
	O. Akar, T. Akin, and K. Najafi, "A Wireless Batch Sealed Absolute Capacitive Pressure Sensor," Sensors and Actuators Journal A Vol.95/1, pp. 29-38, December 2001.
	O. Akar and T. Akin, "Silicon Micromachined Capacitive Pressure Sensor for Industrial and Biomedical Applications (In Turkish)," Digest, 7th. National Conf. of Electric-Electronics-Computer Engineering , pp. 83-86, September, 1997.
	O. Akar, T. Akin, T. Harpster, and K. Najafi, "A Wireless Batch Sealed Absolute Capacitive Pressure Sensor," The 14th European Conf. on solid-State Transducers (Eurosensors XIV), pp. 585-588, Copenhagen, Denmark, August 27-30, 2000.

CMOS Thermopile
	T. Akin, Z. Olgun, O. Akar, and H. Kulah, "An Integrated Thermopile Structure with High Responsivity Using Any Standard CMOS Technology," Sensors and Actuators Journal A 66, pp. 218-224, April 1998.
	Z. Olgun, O. Akar, H. Kulah, and T. Akin, "An Integrated Thermopile Structure with High Responsivity and Detectivity in Any Standard CMOS Technology," Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS'97), pp. 1263-1266, Chicago, June 1997.
	Z. Olgun, O. Akar, H. Kulah ve T. Akin, "Standart CMOS Teknolojisi ile Üretilebilen Isýlküme Tipi Kýzýlötesi Dedektörler," Elektrik-Elektronik-Bilgisayar Muhendisligi 7. Ulusal Kongresi, s. 75-78, Eylul, 1997 (in Turkish).

Other Papers
	M. Tepegoz and T. Akin, “A Redout Circuit for QWIP Infrared Detector Arrays using Current Mirroring Integration,” European Solid-State Circuits Conference (ESSCIRC 2003), pp. 133-136, Estoril, Portugal, September 16-18, 2003.
	B. Okcan and T. Akin, “A Thermal Conductivity Based Humidity Sensor in a Standard CMOS Process,” The 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2004), pp. 552-555, Maastricht, The Netherlands, January 25-29, 2004.