METUMEMS Research Group

Middle East Technical University
Department of Electrical and Electronics Engineering

Name/Surname:

Tayfun AKIN

Position:

Prof. Dr.

Research Interests:

Micro-Electro-Mechanical Systems (MEMS)

MicroSystems Technologies (MTS)

Silicon-based integrated microsensors and transducers

Infrared detectors and readout circuitry

Micromachined Gyroscopes

RF MEMS

Analog and digital integrated circuit design

Silicon micromachining

Implantable microtelemetry systems and transducers for biomedical applications

Web page:

www.eee.metu.edu.tr/~tayfuna

E-mail:

tayfuna@metu.edu.tr

Name/Surname:

Orhan Şevket Akar

Position:

Senior Research Engineer

MS Thesis:

(completed in 1998)

Silicon Micromachined Capacitive Pressure Sensors for Industrial and Biomedical Applications

Web page:

www.metu.edu.tr/~oakar

E-mail:

oakar@metu.edu.tr

Name/Surname:

Said Emre Alper

Position:

Research Fellow

PhD Thesis:
(completed in 2005)

MEMS Gyroscopes for Tactical-Grade Inertial Measurement Applications
(Received the METU THESIS OF THE YEAR AWARD, given by Prof. Dr. Mustafa N. Parlar Education and Research Foundation)

MS Thesis:

(completed in 2000)

Silicon Surface Micromachined Gyroscope using MEMS Technology
(Received the METU THESIS OF THE YEAR AWARD, given by Prof. Dr. Mustafa N. Parlar Education and Research Foundation)

Web page:

E-mail:

said@metu.edu.tr

Name/Surname:

M. Yusuf Tanrıkulu

Position:

Research Fellow

Research Interests:

Infrared Detectors

MEMS Fabrication Technologies

Silicon Micromachining

Analog/Digital VLSI Design

PhD Thesis:
(completed in 2007)

An Uncooled Infrared Microbolometer Detector Array Using Surface Micromachined MEMS Technology

MS Thesis:

(completed in 2002)

A High Fill Factor CMOS Uncooled Infrared Microbolometer Detector

Web page:

www.mems.eee.metu.edu.tr/~tanrikul

E-mail:

myusuf@metu.edu.tr

Name/Surname:	Kağan Topallı
Position:	Research Fellow
Research Interests:	MEMS Components Design and Fabrication for RF Applications RF MEMS Switch RF MEMS Phase Shifter RF MEMS Impedance Matcher and Power Divider RF MEMS Phased Array Antenna
PhD Thesis: (completed in 2007)	A Monolithic Phased Array using RF MEMS Technology
Web page:	http://www.mems.eee.metu.edu.tr/~topalli
E-mail:	kagan@metu.edu.tr

Name/Surname:

Mehmet Ünlü

Position:

PhD Candidate

Research Interests:

MEMS Components Design and Fabrication for RF Applications

RF MEMS Switch

RF MEMS Phase Shifter

RF MEMS Impedance Matcher and Power Divider

RF MEMS Phased Array Antenna

PhD Thesis (continuing):

Impedance Matching Circuits and Applications using RF MEMS Technology

MS Thesis:

(completed in 2003)

RF MEMS Components for Microwave Applications

Web page:

E-mail:

munlu@metu.edu.tr

Name/Surname:

Murat Tepegöz

Position:

PhD Candidate

Research Interests:

Analog and Digital VLSI Design

Readout circuits for cooled and uncooled infrared detector arrays

PhD Thesis (continuing):

A Monolithic Readout Circuit for Large Format Uncooled Infrared Detector Focal Plane Arrays

MS Thesis:

(completed in 2003)

A High Performance CMOS Readout Circuit for QWIP and InSb Infrared Focal Plane Arrays

Web page:

www.eee.metu.edu.tr/~tepegoz

E-mail:

tepegoz@metu.edu.tr

Name/Surname:	Ilker Ender Ocak
Position:	PhD Student
Research Interests:
PhD Thesis (continuing):	A High Performance Gyroscope and Accelerometer System using Bulk Micromachining
Web page:
E-mail:	ocak@mems.eee.metu.edu.tr

Name/Surname:	Ercihan İncetürkmen
Position:	MS Student
Research Interests:
MS Thesis (continuing):	Low-Cost High Performance Infrared Detector Arrays in SOI-CMOS Technology
E-mail:

Name/Surname:	Fehmi Çivitçi
Position:	MS Student
Research Interests:
MS Thesis (continuing):	Development of High Fill Factor Uncooled Infrared Detector Pixels
E-mail:

Name/Surname:	Reha Kepenek
Position:	MS Student
Research Interests:
MS Thesis (continuing):	Capacitive CMOS Readout Circuits for High Performance MEMS accelerometers
E-mail:

Name/Surname:	Korhan Şahin
Position:	MS Student
Research Interests:
MS Thesis (continuing):	Three Dimensional MEMS Actuator Structures
E-mail:

Name/Surname:	Emre Şahin
Position:	MS Student
Research Interests:
MS Thesis (continuing):	Readout Electronics for MEMS Inertial Sensors
E-mail:

Name/Surname:	Alperen Toprak
Position:	MS Student
Research Interests:
MS Thesis (continuing):	CMOS Readout Electronics for Microbolometer Type Infrared Detector Arrays
E-mail:

Name/Surname:	Emre Kültürsay
Position:	MS Student
Research Interests:
MS Thesis (continuing):	External Readout Electronics for Uncooled Infrared Detector Arrays
E-mail:

Name/Surname:	Kerem Kapucu
Position:	MS Student
Research Interests:
MS Thesis (continuing):	Advanced CMOS Readout Electronics for Uncooled Infrared Detector Arrays
E-mail:

Name/Surname:	Alp Oğuz
Position:	MS Student
Research Interests:
MS Thesis (continuing):
E-mail:

Name/Surname:	Mehmet Kargı
Position:	Technician
E-mail:	mkargi@metu.edu.tr

Name/Surname:	Celalettin İmer
Position:	Technician
E-mail:	resiti@metu.edu.tr

Alumni

Name/Surname:

Deniz Sabuncuoğlu Tezcan

Position:

Instructor

Research Interests:

PhD Thesis:

(completed in 2002)

An Uncooled Silicon Micromachined Infrared Detector Focal Plane Array for Night Vision Applications

MS Thesis:

Web page:

www.eee.metu.edu.tr/~denizs

E-mail:

denizs@metu.edu.tr

Dr. Deniz Sabuncuoglu Tezcan is currently with IMEC.

Name/Surname:

Selim Eminoğlu

Position:

PhD Graduate

Research Interests:

Analog-Digital VLSI Design

VLSI Signal Processing for Telecommunication Applications

Sensor Redout and Signal Conditioning

Infrared Detector Arrays and Readout Circuits

PhD Thesis: (completed in 2003)

Uncooled Infrared Focal Plane Arrays with High Performance Readout Circuitry using CMOS and MEMS Technologies

MS Thesis:

(completed in 1998)

Analog-Digital Mixed-Signal VLSI Modules for Audio Band Signal Processing Applications

Web page:

www.eee.metu.edu.tr/~eminoglu

E-mail:

semin@metu.edu.tr

Dr. Selim Eminoglu is currently with Rockwell Scientific.

Name/Surname:

Özge Zorlu

Research Interests:

MS Thesis:

(completed in 2002)

A Silicon Micromachined Temperature and Piezoresistive Pressure Sensor Cluster

Web page:

www.eee.metu.edu.tr/~zorlu

E-mail:

zorlu@metu.edu.tr

Ozge Zorlu is currently with EPFL for PhD Study.

Name/Surname:

Hüseyin Sağkol

Research Interests:

RF MEMS component design and fabrication

MS Thesis:

(completed in 2002)

A Phase Shifer using RF MEMS Technology

Web page:

www.eee.metu.edu.tr/~sagkol

E-mail:

sagkol@metu.edu.tr

Huseyin Sagkol is currently with TU Delft for PhD study.

Name/Surname:

Refet Fırat Yazıcıoğlu

Research Interests:

Silicon Micromachined Accelerometers and Gyroscopes using Mems Technology

Readout circuits for micromachined Gyroscopes and Accelerometers

Feedback circuits for micromachined Gyroscopes and Accelrometers

VLSI circuit design

Implementation of test programs for control of virtual instruments (using LabWINDOWS/CVI)

MS Thesis:

(completed in 2003)

A Silicon Micromachined Accelorometer

Web page:

www.eee.metu.edu.tr/~yfirat

E-mail:

yfirat@metu.edu.tr

Firat Yazicioglu is currently with IMEC for PhD study.

Name/Surname:	Mehmet Akif Erismis
Position:	Graduate Student
Research Interests:	MEMS Accelerometers and Gyroscopes design and fabrication
MS Thesis (completed in 2004)	An Inertial Navigation System with MEMS Technology
Web page:
E-mail:	erismis@metu.edu.tr

currently with IMEC for PhD study.

Name/Surname:

Burak Okcan

Research Interests:

MS Thesis:

(completed in 2003)

A Humidity Sensor using MEMS Technology

Web page:

E-mail:

okcan@metu.edu.tr

Name/Surname:	Kemal Safak Demirci
Position:	Graduate Student
Research Interests:	Analog and Digital VLSI Design MEMS Fabrication Technologies Infrared Detectors
MS Thesis: (completed in August 2005)	Uncooled Infrared Detectors using Surface Micromachining
Web page:
E-mail:	demirci@mems.eee.metu.edu.tr

Safak Demirci is currently with Gatech for PhD study.

Name/Surname:	Erkan Alpman
Position:	PhD Student
Research Interests:	Analog and Digital VLSI Design MEMS Fabrication Technologies Infrared Detectors
MS Thesis: (completed in August 2005)	Uncooled Infrared Detectors in Standard CMOS Technology
Web page:	www.mems.eee.metu.edu.tr/~alpman
E-mail:	alpman@mems.eee.metu.edu.tr

Name/Surname:	Gozde Ceren Yasinok
Position:	Graduate Student
Research Interests:	MEMS Fabrication Technologies Infrared Detectors
MS Thesis (continuing):	Development of Electrochemical Etch Stop Techniques for Integrated MEMS Sensors
Web page:
E-mail:	ceren@mems.eee.metu.edu.tr

Name/Surname:	Omer Ozgur Yildirim
Position:	Graduate Student
Research Interests:
MS Thesis (continuing):
Web page:
E-mail:

Name/Surname:	Kanber Mithat Silay
Position:	Graduate Student
Research Interests:
MS Thesis (continuing):	Readout Electronics for MEMS Inertial Sensors
Web page:	www.eee.metu.edu.tr/~silay
E-mail:	silay@metu.edu.tr

Name/Surname:	Kivanc Azgin
Position:	Graduate Student
Research Interests:
MS Thesis (continuing):
Web page:
E-mail:

Name/Surname:	Yuksel Temiz
Position:	Graduate Student
Research Interests:
MS Thesis (continuing):	A Monolithic MEMS Gyroscope
Web page:	www.mems.eee.metu.edu.tr/~temiz
E-mail:	temiz@mems.eee.metu.edu.tr