| VLSI-MEMS Design Laboratory |
| Available Computing Facilities: |
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 SUN Fire V440 Server |
| 4x1GHz processor |
| 8 GB RAM |
| 140 GB HD |
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| SUN Blade 1000 |
| 2x800MHz processor |
| 3 GB RAM |
| 140 GB HD |
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| SUN Blade 100 |
| 5x SUN ULTRA 5 terminal |
| SUN ULTRA 1 terminal |
| HP ML350G4 File Server |
| 10x HP DC7100 3Ghz terminal |
| HP Color LaserJet 2500 printer |
| 2xHP LaserJet 1200 printer |
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| Available Software Packages |
| Cadence IC Design 4.4.5 |
| Coventorware 2003 |
| Synopsys 2003 |
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Process Facilities |
| Lithography |
| <1µm resolution |
| EVG 620 Precision Alignment System & Bond Aligner for 4” & 6” |
| Karl Suss MA 56 Aligner |
| Cobilt CA-800 Manual Mask Aligners (APPLIED MATERIALS) |
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| Wafer Bonding |
| EVG 501 Universal Bonder 4” & 6” |
| Silicon to glass anodic bonding |
| Eutectic bonding |
| Thermocompression bonding |
| Fusion bonding |
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| Dry / Wet Oxidation |
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| Deep Reactive Ion Etching (DRIE) |
| STS Multiplex ASE HRM System for 4" and 6" wafers, upgradable to 8" |
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| Diffusion |
| Boron (Source : BBr 3 , B 2 H 6 ) |
| Phosphorus (Source : POCl 3 , 26 furnaces, THERMCO) |
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| Electroplating |
| Nickel electroplating |
| Copper electroplating |
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| SU-8 molding (Under development) |
| SU-8 patterns. Feature size: 5-20 um, height: 35-40 um |
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| Evaporation |
| Au, Au/As, Ni, Cr, Cu, Ti. |
| VARIAN 3119 e-gun source system |
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| SPUTTERING |
| Al, Cr, Ni-Cr, Cu, Ti, Ta. |
| BALZERS BAS 450 PM planar magnetron sputtering system |
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| Etching |
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| Silicon dioxide etching |
| Anisotropic silicon etching (KOH, TMAH, EDP) |
| Isotropic silicon etching (HNA) |
| Electrochemical etch stop (KOH, TMAH) |
| Oxygen plasma |
| Metal etching |
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| Passivation |
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| Wafer Dicing |
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| Back-Lapping (Speedfam) |
| Scanning Electron Microscope (SEM) |
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| Critical Point Drier |
| Supercritical Automegasamdri 915B |
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| Test Laboratory |
| Available Testing Equipments: |
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| VLSI Design Student Laboratory |
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This laboratory is used for Introduction to VLSI Design (EE413), Principles of Analog VLSI Design (EE617), and Principles of Digital CMOS VLSI Design (EE618) courses. Personal computers are used as terminals in order to use design software like Cadence and Coventorware. |
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| 10 Personal Computers are available: |
| Pentium 4 - 1.7 Ghz |
| 128 MB RAM |
| 60 GB HD |
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| Available Software |
| Windows XP OS |
| OpenOffice.org 1.1 |
| XWinPro and Putty |
| A number of tools like Filezilla, IrfanView, WinRAR |
| Acrobat Reader |
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For further information, see EE413 web page. |
